ʻO ka hoe silikone Carbide Cantilevers
ʻIke kikoʻī a me ka noi
ʻO ka wafer nui e hoʻouka nei i ka ikaika silicon carbide SiSiC / SiC cantilever hoe / kūpono ke kūpono no kahi lopako hoʻouka a me ka lawelawe ʻana i ka ʻōnaehana no ka mea he hana paʻa, non-deformation i ke kiʻekiʻe wela a me ka ikaika hoʻoili wafer nui. Ma muli o ka paʻa o ka ʻāpana o ka hoe cantilever me ka deformation, hiki ke hana i ka wafer nui aʻe me ka hoʻohana ʻana i nā paipu umu. Hiki ke hoʻopili ʻia ka wafer nui e hoʻouka ana i ka silicon carbide SiSi / SiC cantilever hoe a me ka lāʻau i LPVCD ma muli o ke ʻano o ka laulima hoʻomohala hoʻomehana me ka uhi LPVCD, kahi e hoʻolōʻihi ai i ka mālama a me ka holoi hoʻomaʻemaʻe, a hoʻoliʻiliʻi nui i nā mea haumia.
Nā palena kikoʻī o ka hopena i hoʻopaʻa ʻia me ka silbona carbide RBSIC:
| 'ikamu | ʻāpana | ʻikepili |
| Mahana o ka noi | ℃ | 1380 |
| nuʻa | G / cm3 | > = 3.02 |
| Open porosity | % | <0.1 |
| Moh o ka paakiki | 13 | |
| Ikaika kūlou | Mpa | 250 (20 ℃) |
| Mpa | 280 (1200 ℃) | |
| Modulus o ka laholio | ʻO Gpa | 330 (20 ℃) |
| ʻO Gpa | 300 (1200 ℃) | |
| ʻOhana conductivity | W / mk | 45 (1200 ℃) |
| Coefficient o ka hoʻonui hoʻonui wela | K-1 * 10-6 | 4.5 |
| ʻAkika-hōʻoia ʻakika | Maikaʻi loa |
Hiʻona:
a. ʻAʻole ia e deform i ke ana wela kiʻekiʻe a nui ka ikaika o ka wafer hoʻouka;
b. ʻO ke kūpikipiki kūpilikiʻi maikaʻi loa a me ke ola lōʻihi;
c. ʻO ka coefficient hoʻonui hoʻonui o ka hoe cantilever he mea liʻiliʻi ia, kahi e hoʻolōʻihi ai i ka mālama a me ka hoʻomaʻemaʻe o ke kaʻapuni;
a hōʻemi loa i nā mea haumia
ʻO nā lako hana kino e ka silicon carbide ceramic
Ma waho o ka Reaction sintered silicon carbide SiSiC cantilever hoe no ka wafer ke hoʻouka nei, hana pū mākou i nā mea hana kīwaha ʻē aʻe me nā kaola RBSIC / SISIC silikō, nā paipu nozzle, nā puʻupuʻu nīhou spiral, paipu puhipuhū huʻihuʻi, paukū paʻa paʻa a me nā paipu hoʻoluʻu RBSIC .
E ʻaʻano i nā huahana RBSIC / SISIC hoʻopale
Ma muli o kā mākou RBSIC / SISIC huahana silikona carbide i ke keu pono o ke kū pono o ka pale maikaʻi, ke kūpaʻa a me ke ola lōʻihi, hiki ke hana ʻia i nā pale pale pale i hiki ke hoʻokomo maʻalahi ʻia i nā paipu hana a i ʻole nā cyclones.
